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发明名称
SPIN COATER FOR MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH10242030(A)
申请公布日期
1998.09.11
申请号
JP19970044026
申请日期
1997.02.27
申请人
NEC YAMAGATA LTD
发明人
TAKEDA HIDENORI
分类号
G03F7/16;B05C11/08;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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