THIN FILM FERROELECTRIC CAPACITORS HAVING IMPROVED MEMORY RETENTION THROUGH THE USE OF ESSENTIALLY SMOOTH BOTTOM ELECTRODE STRUCTURES

摘要

A ferroelectric thin film capacitor (400) has smooth electrodes (412, 420) permitting comparatively stronger polarization, less fatigue, and less imprint, as the ferroelectric capacitor ages. The smooth electrode surfaces (414, 428) are produced by carefully controlled drying, soft baking, and annealing conditions.