Thermoelectric sensor

摘要

The thermoelectric sensor (12) is formed with a membrane supported on a substrate (16). The membrane is formed as a number of discrete elementary cells, which are arranged in grid form, and are each composed of thermoelectric elements (20). The thermoelectric elements themselves comprise many thermocouples. The elementary cells are covered by a passive layer (30) and are thermally insulated from each other by metallic wires (22,23) configured as a grid. The metallic wires are preferably made from gold and are connected to the substrate for heat dispersal. Heat insulation between cells is further improved by low conduction spaces (28), which are 10-50 mu m wide.