Purification process for silane compound

摘要

There is provided a purification process for dimethoxymethylsilane in which a mixture containing dimethoxymethylsilane and methanol is subjected to a first distillation step in which the mixture is distilled in the presence of methyl formate or methoxytrimethylsilane so that a distillate fraction containing methanol and methyl formate or methoxytrimethylsilane is distilled off and a balance fraction containing dimethoxymethylsilane and methanol is discharged, the amount of methanol in the balance fraction being substantially reduced relative to that of the mixture.