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经营范围
发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH10237661(A)
申请公布日期
1998.09.08
申请号
JP19970036356
申请日期
1997.02.20
申请人
TOSHIBA MACH CO LTD
发明人
ASANOME YUTAKA;FUKUYAMA SATOSHI
分类号
C23C16/44;C23C16/50;H01L21/205;(IPC1-7):C23C16/50
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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