OPTICAL THIN-FILM PRODUCTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an optical thin film production system capable of designing and producing thin films having always stable quality. SOLUTION: This system has a thin film design expert system 100 constituted in such a manner that a thin film design inference engine 103 automatically designs the optimum thin film constitution satisfying design specifications by referencing the contents of a thin film design knowledge base 101 and thin film design data base 102 in accordance with the design specifications of the optical thin films and a thin film production expert system 200 constituted in such a manner that a thin film production inference engine 203 determines the optimum vapor deposition conditions at the time of thin film production in an apparatus 600 for production of thin films by referencing the contents of a thin-film production knowledge base 201 and a thin film production data base 202 in accordance with the thin film constitution output from the thin film design expert system.