There is provided an apparatus for machining surfaces to accuracies within the nanometer range by use of electrical current flow through the contact of the cutting tool with the workpiece as a feedback signal to control depth of cut.
申请公布号
US5802937(A)
申请公布日期
1998.09.08
申请号
US19950507628
申请日期
1995.07.26
申请人
THE REGENTS OF THE UNIVERSITY OF CALIF.
发明人
DAY, ROBERT DEAN;FOREMAN, LARRY R.;HATCH, DOUGLAS J.;MEADOWS, MARK S.
