发明名称 |
Plasma processing apparatus having a protected microwave transmission window |
摘要 |
A plasma processing apparatus includes a microwave introducing member, which is provided with a microwave transmission opening through which microwaves pass into a processing chamber. The microwave introducing member is also provided at a transmission opening with a dielectric member. Preferably, the dielectric member is formed to have a relative dielectric constant of 4 to 10 and an insulation resistance of 108 to 1012 OMEGA .
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申请公布号 |
US5804923(A) |
申请公布日期 |
1998.09.08 |
申请号 |
US19960663645 |
申请日期 |
1996.06.14 |
申请人 |
SUMITOMO METAL INDUSTRIES LIMITED;NIPPON ELECTRIC CO |
发明人 |
IIO, KOUICHI;KOMACHI, KYOUICHI;KATAYAMA, KATSUO;AKIMOTO, TAKESHI |
分类号 |
H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):C23C16/00 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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