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发明名称
BACK SPUTTERING SHIELD
摘要
申请公布号
JPH10237638(A)
申请公布日期
1998.09.08
申请号
JP19980033508
申请日期
1998.01.08
申请人
APPLIED MATERIALS INC
发明人
ADAMS BRET;HAMILTON GREGORY N
分类号
C23C14/34;H01J37/34;H01L21/203;H01L21/31;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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