发明名称 |
Atomic force microscope and method of analyzing frictions in atomic force microscope |
摘要 |
An atomic force microscope comprises a vibrating device for producing transverse vibrations between a sample and a probe and a vertical load-adjusting device for adjusting the vertical load between the sample and the probe. The sample is vibrated transversely, thus inducing a deflecting vibration on a cantilever. The phase and the amplitude of this deflecting vibration are simultaneously measured. The dependence of the measured value on the vertical load between the sample and the probe is measured. Thus, the friction between the sample and the probe is analyzed.
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申请公布号 |
US5804708(A) |
申请公布日期 |
1998.09.08 |
申请号 |
US19950528956 |
申请日期 |
1995.09.15 |
申请人 |
AGENCY INDUSTRIAL SCIENCE AND SEIKO INSTRUMENTS INC. |
发明人 |
YAMANAKA, KAZUSHI;TOMITA, EISUKE |
分类号 |
G01L5/00;G01B5/28;G01B21/30;G01N37/00;G01Q60/24;G01Q60/26;(IPC1-7):G01B5/28 |
主分类号 |
G01L5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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