摘要 |
PROBLEM TO BE SOLVED: To provide an electrode substrate in which adhesion of a resist layer to an electrode pattern is enhanced and the resist layer is not stripped off even during plating work and plating liquid or impurities are not left on the periphery of the resist layer. SOLUTION: An aperture electrode 1 comprises an insulating substrate 2, an antistatic sliding coat layer 4 provided on the rear surface of the insulating substrate 2, a large number of openings 5 arranged in a row at a constant interval, an electrode pattern 31 comprising a large number of control electrodes 6 surrounding each opening 5 independently, and a resist layer 3 for protecting the electrode pattern 31. The electrode pattern 31 has a surface roughened by chemical etching and bonded tightly to the resist layer 3. |