发明名称 |
Miniature probe positioning actuator |
摘要 |
Disclosed is a Mini Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging. The probe positioning actuator is composed of a pair of substantially parallel cantilevered beams, each beam being comprised of flexible, signal carrying cable formed of a polyimide composition which allows for the probe tip to be suspended from and form part of the armature of the actuator. The armature also includes a pair of oppositely wound coils intermediate the beams, which coils coact electromagnetically with a pair of spaced apart but fixedly positioned (relative to the coils/armature) magnets forming a motor for effecting armature and thus probe tip movement. The light mass of the coils and armature and the dual functional purpose of the suspension beams serves to make the probe actuator highly accurate and sensitive while allowing for reliable operation.
|
申请公布号 |
US5804982(A) |
申请公布日期 |
1998.09.08 |
申请号 |
US19950451634 |
申请日期 |
1995.05.26 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LO, JIANN-CHANG;SERVEDIO, MICHAEL;HAMMOND, JAMES MICHAEL |
分类号 |
G01L1/00;G01R1/06;G01R1/067;G01R31/28;G05D3/00;H01L21/66;(IPC1-7):G01R1/06 |
主分类号 |
G01L1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|