发明名称 |
Resist processing apparatus having an interface section including two stacked substrate waiting tables |
摘要 |
A processing system comprising a loading/unloading section, a processing section and an interface section. The system further comprises a convey mechanism and at least two waiting sections. The convey mechanism can move in either direction between between the loading/unloading section and the interface section, for conveying objects to the processing units included in the processing section and conveying objects in either direction between the loading/unloading section and the interface section. The waiting sections are provided for temporarily holding an object before the convey mechanism conveys an object to the interface section.
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申请公布号 |
US5803932(A) |
申请公布日期 |
1998.09.08 |
申请号 |
US19950427871 |
申请日期 |
1995.04.26 |
申请人 |
TOKYO ELECTRON LIMITED;TOKYO ELECTRON KYUSHU LIMITED |
发明人 |
AKIMOTO, MASAMI;OGAWA, SHIZUO;NAGANO, TOSHIHIKO |
分类号 |
B65G49/07;H01L21/00;H01L21/02;H01L21/027;H01L21/677;(IPC1-7):B65G49/07;B05C13/02 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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