| 摘要 |
PROBLEM TO BE SOLVED: To obtain a polyether sulfone moisture sensing film with no pores even through drying and film-forming processes in air by applying a polyether sulfone solution dissolved in a mixed solvent of xylene and N-methyl-2- pyrolidone onto a lower electrode and forming by heating. SOLUTION: After forming a lower electrode 2 on an insulating substrate 1, a moisture sensing film 3 is formed, and further an upper electrode 4 is formed on it. Here, a solution formed by dissolving polyether sulfone of preferably 15-25% by weight in a mixed solvent of N-methyl-2-pyrolidone 1.8-2.2 times in volume ratio to xylene is used for the formation of the moisture sensing film 3. Then, it is applied onto the lower electrode 2 and heated to approximately 115-125 deg.C in air. By this, it is possible to form a polyether sulfone film with a film thickness of approximately 1-3μm. In this way, it is possible to obtain the moisture sensing film 3 with no pores even through formation in air.
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