发明名称 |
Scanning tunneling microscope with cantilever type displacement element |
摘要 |
<p>A cantilever type displacement element comprises a piezoelectric layer (5) and at least two electrodes (2, 3) for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever. <IMAGE></p> |
申请公布号 |
EP0518618(B1) |
申请公布日期 |
1998.09.02 |
申请号 |
EP19920305283 |
申请日期 |
1992.06.09 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SUZUKI, YOSHIO;HIRAI, YUTAKA;TAKAMATSU, OSAMU;NAKAYAMA, MASARU;YAGI, TAKAYUKI;KASANUKI, YUJI;YAMAMOTO, KEISUKE;SHIMADA, YASUHIRO |
分类号 |
G01B21/30;B81B3/00;G01N27/00;G01N37/00;G01Q10/04;G01Q60/10;G01Q60/16;G01Q70/08;G01Q70/16;G01Q80/00;G11B9/00;G11B9/14;H01J37/28;H01L41/09;(IPC1-7):G01N27/00;G01B7/34 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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