发明名称 Scanning tunneling microscope with cantilever type displacement element
摘要 <p>A cantilever type displacement element comprises a piezoelectric layer (5) and at least two electrodes (2, 3) for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever. <IMAGE></p>
申请公布号 EP0518618(B1) 申请公布日期 1998.09.02
申请号 EP19920305283 申请日期 1992.06.09
申请人 CANON KABUSHIKI KAISHA 发明人 SUZUKI, YOSHIO;HIRAI, YUTAKA;TAKAMATSU, OSAMU;NAKAYAMA, MASARU;YAGI, TAKAYUKI;KASANUKI, YUJI;YAMAMOTO, KEISUKE;SHIMADA, YASUHIRO
分类号 G01B21/30;B81B3/00;G01N27/00;G01N37/00;G01Q10/04;G01Q60/10;G01Q60/16;G01Q70/08;G01Q70/16;G01Q80/00;G11B9/00;G11B9/14;H01J37/28;H01L41/09;(IPC1-7):G01N27/00;G01B7/34 主分类号 G01B21/30
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