发明名称 CARRIER FOR GRINDING
摘要 PROBLEM TO BE SOLVED: To prevent the falling-off of a body to be ground or an inner carrier from a holding hole by continuously providing curved waveform recessed and projecting parts at equal intervals on the full periphery of the inner surface of the holding hole and setting the diameter of an inscribed circle contacted with each peak of the waveform projecting part to be larger than that of the body to be ground. SOLUTION: Curved waveform recessed and projecting parts 9 are continuously provided at equal intervals on the full periphery of the inner peripheral surface 4 of the circular holding hole 2 of a carrier 1. Since the diameter of an inscribed circle for connecting the peaks of the waveform projecting parts 9 is set larger than that of a body 8 to be ground, it is self-rotated in the holding hole 2 during grinding work. When the outer peripheral surface 10 of the body 8 to be ground is contacted with the inner peripheral surface 4 of the holding hole 2, since the outer peripheral surface 10 is contacted with two adjacent waveform projecting parts 9b, a pressing force applied from the body 8 to be ground to the carrier 1 is dispersed and thus the bending of the carrier 1 is prevented and the falling-off of the body 8 to be ground from the holding hole 2 is prevented.
申请公布号 JPH10230453(A) 申请公布日期 1998.09.02
申请号 JP19970053836 申请日期 1997.02.21
申请人 O P C:KK 发明人 FUKUZAKI FUKUSHICHI
分类号 B24B37/27;B24B37/28;H01L21/304 主分类号 B24B37/27
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