| 摘要 |
PROBLEM TO BE SOLVED: To properly measure the gap with the electrode plate opposite to the pixel electrode plate of a liquid crystal cell. SOLUTION: A luminous flux LT of a mercury lamp 611 is outputted for a proper amount of time by controlling a shutter 612, is focused to a spot Sp of excitation light (ultraviolet rays or near ultraviolet rays) by a pin hole p, a focusing lens 614, and an excitation filter 615, is projected to the surface of a first galss substrate 1a and is transmitted through each layer, excitation light reflected by the surface of each layer is eliminated, fluorescence R3' and R4' generated on the surface of both alignment layers 3a and 3b are transmitted and the images are formed at the element of a CCD sensor 623 by an image- focusing lens 622, a gap G' between the surfaces of both alignment layers 3a and 3b is calculated from the gap of both elements whose images are formed, and a thicknessΔG of the alignment layer 3b is added to it, thus obtaining the dimension of the a gap G between a picture element electrode plate 2a and the counter electrode plate 2b. As a result, by using fluorescence and a fluorescence transmission filter, unneeded reflection light of each layer is eliminated, thus positively and accurately measuring the gap G.
|
