发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which satisfies required charge holding property and is highly reliable for a long time without deterioration with time elapse. SOLUTION: This device is provided with a gate 4, first and second diffusion areas 5 and 10 for seizing the gate from both sides, and a contact hole 17 for connecting the first diffusion area 10 electrically with a lower electrode 8 of a self capacitor for accumulating charges, on a substrate 1, and when a reverse voltage Vrev is applied as a joint impressed voltage between the area 10 and the substrate 1, a leak current Ileak flows therebetween. The joint impressed voltage Vrev at the time when the leak current Ileak is represented by a formula, Ileak=Cs×(Vbit/2)×(1/T)×(1/S) (Cs: charge accumulation capacity in self capacitor; Vbit: voltage applied to a data line 12 connecting with the second area 5; T: target charge holding time; S: the first diffusion area 10) is three times or more the voltage Vbit applied to the data line 12 in room temperature.
申请公布号 JPH10233492(A) 申请公布日期 1998.09.02
申请号 JP19970294488 申请日期 1997.10.27
申请人 MATSUSHITA ELECTRON CORP 发明人 AKAMATSU SUSUMU
分类号 H01L21/66;H01L21/822;H01L21/8234;H01L21/8242;H01L27/04;H01L27/088;H01L27/108 主分类号 H01L21/66
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