| 摘要 |
PROBLEM TO BE SOLVED: To enable inspection with high reliability by judging only an test specimen without leakage to be acceptable by both air leak tester and helium leak detector. SOLUTION: Test specimens supplied to a parts supplying means 100 are arranged one by one in the posture to be sent to an arranging means 200. When the test specimens are completely housed in all housing parts 201, the arranging means 200 advances to a position shown by the dotted line to be stopped. Then, the respective test specimens are inserted into test capsules 401A-401H of a lower capsule plate 400 mounted on an endless carrying means 300 by a vacuum attraction head. The presence of leakage from the respective test specimens is inspected in a gross leak test station 500 and a fine leak test station 600 along a carrying path A→B→C of the endless carrying means 300. The test specimens on the lower capsule plate 400 returned to a position A after making a round are divided into accepted one and rejected one to be housing parts 700 according to the result of tests stored in a memory for every test capsule 401A-401H.
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