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发明名称
DEVICE FOR LOCATING FAILURE POINT AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10232270(A)
申请公布日期
1998.09.02
申请号
JP19970036304
申请日期
1997.02.20
申请人
MITSUBISHI ELECTRIC CORP
发明人
YOSHIDA EIJI
分类号
G01R31/302;H01L21/66;(IPC1-7):G01R31/302
主分类号
G01R31/302
代理机构
代理人
主权项
地址
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