| 摘要 |
PROBLEM TO BE SOLVED: To perform automatic teaching with a simple technique in a wafer transferring/mounting machine which transfer/mounts a wafer between a wafer board and a transferring/mounting arm. SOLUTION: A positioning wafer 50 is provided with an (x) sensor 51,θsensors 53 and 54 and a (z) sensor 52 constituting a reflection type proximity detecting part, and the wafer 50 is mounted on a wafer boat 2, and an operator makes a transferring/mounting arm 41 go into the lower part of the wafer 50. First, the transferring/mounting arm 41 is elevated, and, when there is an output supplied from the (z) sensor 52, the position of it is written in a memory 72 of a control part 7. Then, the transferring/mounting arm 41 is rotated, and, when there are outputs supplied from theθsensors 53 and 54, the positions of them are written in the memory 72. Lastly, the transferring/mounting arm 41 is made to go, and, when there is an output supplied from the (x) sensor 51, the position of it is written in the memory 72. Thus, control positions (x- position,θ-position, z-position) of the transferring/mounting arm 41 are stored in the memory 72 for performing automatic teaching.
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