| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor for reducing an unneeded vibration that deteriorates a detection accuracy. SOLUTION: An angular velocity sensor is constituted of a substrate 3 that is formed in a flat-plate shape, a vibrator 4 that is made of a piezoelectric single body and where various kinds of electrodes are mounted, and a fixing member 6 that is included between the vibrator 4 and the substrate 3 and is used to fix the vibrator 4 to the substrate 3. Also, the fixing member 6 that is adhered in one piece with the vibrator 4 is subjected to laser welding to the substrate 3 on the side surface (a surface that continues to a fixing surface 6b) of a connection part 32 while a fixing surface is directly adhered to the substrate 3. More specifically, the fixing member 6 is fixed to an area to the substrate 3 without including any foreign objects, thus retaining the vibrator 4 mounted to the fixing member 6 accurately and horizontally and hence preventing unneeded vibration components that prevent detection from being generated at the vibrator 4 for accurately detecting an angular velocity. |
