| 摘要 |
PROBLEM TO BE SOLVED: To widen a memorizable region by a method wherein a molding surface for molding the outer periphery side face of a substrate is made of a thermal insulating layer. SOLUTION: The outer periphery side face molding surface 46 of the stamper outer periphery holder 8 of a movable mold 41 is covered with a thermal insulating layer 13. The thermal insulating layer 13 is made of yttria-stabilized zirconia consisting of 92mol.% of ZrO2 and 82mol.% of Y2 O3 and is strip thin film having the width of 10mm and the film thickness of 0.3mm and the Vickers hardness of 500-600. The zirconia heat insulating layer (the thermal conductivity of which is 4.0W/m.K or less) is formed by a flame spraying method. Concretely, ceramic powder is heated up to 3,000 deg.C or higher and melted by a plasma powder spraying method so as to be flame-sprayed at the spraying speed of 100-300m/s against the predetermined region of the stamper outer periphery holder 8 in order to form the thermal insulating layer 13. The stamper 4 in a mold is a circular disc, the outer diameter of which is 140mm, the inner diameter of which is 20.0mm and the thickness of which is 0.3mm and which has a through hole at the center and is made of nickel. In addition, the outer diameter of a molding surface 44 is 120mm. |
