发明名称 HEIGHT MEASURING DEVICE AND METHOD
摘要 PROBLEM TO BE SOLVED: To provide a device for easily adjusting the focusing position of a height-measuring device by the triangulation. SOLUTION: A height-measuring device for measuring the height of a subject from a light point position by forming the image of a light point generated by a light source on the surface of the subject via a lighting side image-forming lens 3 and forming the image of the light point image on a light point position detection element 5 via a light reception side image-forming lens 4, has a stage 12 that can travel in vertical direction by placing the subject, an image pick-up camera 16 for capturing a light point image that is formed on the target surface on the stage 12, a stage 12 where the quantity of light of a specific picture element of the light point image captured by the image pick-up camera 16 is maximized or the shape of the light point image is minimized, or a control part for detecting the application side image-forming lens position as a focusing position.
申请公布号 JPH10232112(A) 申请公布日期 1998.09.02
申请号 JP19970129560 申请日期 1997.05.20
申请人 FUJITSU LTD 发明人 FUSE TAKASHI;OSHIMA YOSHITAKA;NISHIYAMA YOJI;TAKAHASHI FUMIYUKI;TSUKAHARA HIROYUKI
分类号 G01B11/02;G01B11/06;G01C3/06;H01L21/60;H01L21/66 主分类号 G01B11/02
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