| 摘要 |
PROBLEM TO BE SOLVED: To produce an oxide glass membrane homogeneous in the distributions of the thickness of membrane and refractive index by supplying glass fine particles formed through flame hydrolysis of a silicon compound in a hydrogen- oxygen flame burner onto a substrate placed on a turn table having slots to accumulate them on it and heating the resultant glass fine particle layer to make it transparent. SOLUTION: A substrate 2 made of silicon, etc., is placed on a turn table 1 made of quartz, etc., having slots 3 optionally in plural. On the other hand, a silicon compound such as SiCl4 is hydrolyzed in flame of a hydrogen-oxygen flame burner 4, which performs relative motion to the substrate 2 in the X and the Y directions through axes. Fine glass particles formed in this process are supplied onto and accumulated on the substrate 2. During this process, warpage of the substrate 2 generated on heating by the burner is eliminated following the passage of the burner, and the atmospheric gas accumulated on the backside is discharged from the slots 3 to prevent the sliding of the substrate 2. Subsequently, glass fine particle layer formed by the accumulation is heated and sintered to make the layer transparent. Thus, the objective homogeneous oxide glass membrane is obtained. |
