| 摘要 |
<p>PROBLEM TO BE SOLVED: To allow a substrate to be pasted on the adhesive tape of a ring frame with precision while the substrate is handled in a normal posture. SOLUTION: A substrate holding part 1 which holds a substrate W with its rear side downward, a ring frame 3 to which an adhesive tape 2 is pasted, a ring frame holding part 4 which holds the adhesive tape 2 with its adhesive surface upward, a thin-wall elastic member 14 which is, of almost identical shape with the substrate W, provided under the ring frame holding part 4, and a pasting roller 20 which moves, for scanning, along the under side of the ring frame holding part 4 are provided. The adhesive tape 2 is pressed to the rear surface of substrate W through the elastic member 14, along scanning movement of the pasting roller 20.</p> |
