| 发明名称 |
Tantalum-aluminum oxide coatings for semiconductor devices |
| 摘要 |
An active semiconductor device includes a coating comprising an oxide of tantalum and aluminum. The coating may function as an AR coating or as a passivation coating. Applications to ICs and optical devices are described.
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| 申请公布号 |
US5802091(A) |
申请公布日期 |
1998.09.01 |
| 申请号 |
US19960758630 |
申请日期 |
1996.11.27 |
| 申请人 |
LUCENT TECHNOLOGIES INC. |
发明人 |
CHAKRABARTI, UTPAL KUMAR;GRODKIEWICZ, WILLIAM HENRY;WU, PING |
| 分类号 |
G02B1/11;H01L33/00;H01S5/00;H01S5/022;H01S5/028;(IPC1-7):H01S3/19 |
主分类号 |
G02B1/11 |
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