发明名称 Vertical wafer carrier handling apparatus
摘要 An apparatus for efficiently and safely loading, unloading and transporting vertically oriented wafer carriers. The apparatus includes a body having a front and a back face, a top portion and a first and a second side, two horizontally aligned handles mounted to respective first and second sides on the front face of the body. The apparatus further includes an arm having a fixed end attached to the top portion of the back face of the body and a free end containing a slot, extending from the free end toward the fixed end, of dimensions suitable to slidably receive the carrier handle and to restrain movement of the carrier parallel to the back face of the body and a top surface. The top surface has a recessed portion suitable for retaining the handle of the wafer carrier and restraining movement of the carrier perpendicular to the back face and the recessed portion is sufficiently proximate to the back face that the back face will prevent the removal of a wafer contained in the carrier when the carrier handle is retained in the recessed portion. In a preferred embodiment, the body is substantially rectangular and has two rectangular portions cut out symmetrically about the vertical centerline of the body to reduce the weight of the apparatus and which define a middle support and a bottom portion.
申请公布号 US5799995(A) 申请公布日期 1998.09.01
申请号 US19970847278 申请日期 1997.05.01
申请人 MICRON TECHNOLOGY, INC. 发明人 BERGAM, GREGORY D.;VEATCH, DENNIS L.;ANDERSON, MARK R.
分类号 H01L21/687;(IPC1-7):B65D25/28 主分类号 H01L21/687
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