发明名称 Thin film transistor having a buffering pad layer for a liquid crystal display and a method for manufacturing the same
摘要 Disclosed is a thin film transistor (TFT) having a buffering pad layer and a method for manufacturing the same. This TFT is comprised of an active polysilicon pattern formed on a substrate. An oxide film is formed on the active polysilicon pattern. An intrinsic amorphous silicon pattern is formed on the oxide film and a metal pattern on the intrinsic amorphous silicon pattern. The intrinsic amorphous silicon layer serves as a buffering pad. The ion-implantation processes and heat processes are required if other types of silicon were used as a buffering pad.
申请公布号 US5801395(A) 申请公布日期 1998.09.01
申请号 US19960585314 申请日期 1996.01.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, JU-HYUNG;YOUN, CHAN-JOO
分类号 H01L21/28;H01L21/336;H01L29/49;(IPC1-7):H01L29/04;H01L29/76 主分类号 H01L21/28
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