发明名称 |
Thin film transistor having a buffering pad layer for a liquid crystal display and a method for manufacturing the same |
摘要 |
Disclosed is a thin film transistor (TFT) having a buffering pad layer and a method for manufacturing the same. This TFT is comprised of an active polysilicon pattern formed on a substrate. An oxide film is formed on the active polysilicon pattern. An intrinsic amorphous silicon pattern is formed on the oxide film and a metal pattern on the intrinsic amorphous silicon pattern. The intrinsic amorphous silicon layer serves as a buffering pad. The ion-implantation processes and heat processes are required if other types of silicon were used as a buffering pad.
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申请公布号 |
US5801395(A) |
申请公布日期 |
1998.09.01 |
申请号 |
US19960585314 |
申请日期 |
1996.01.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, JU-HYUNG;YOUN, CHAN-JOO |
分类号 |
H01L21/28;H01L21/336;H01L29/49;(IPC1-7):H01L29/04;H01L29/76 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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