发明名称 Ferroelectric capacitors including extended electrodes
摘要 A ferroelectric capacitor includes a substrate and a capacitor electrode on the substrate. A ferroelectric layer is provided on the first capacitor electrode, and a first insulating layer on the ferroelectric layer has a first contact hole therein exposing a portion of the ferroelectric layer. A second capacitor electrode on the first insulating layer makes contact with the ferroelectric layer through the first contact hole. In addition, the second capacitor electrode includes an extension that extends across the first insulating layer away from the first contact hole. A second insulating layer on the second capacitor electrode opposite the substrate has a second contact hole therein exposing a portion of the second insulating capacitor electrode extension opposite the first insulating layer. A conductive line on the second insulating layer makes contact with the exposed portion of a second capacitor electrode extension opposite the insulating layer through the second contact hole.
申请公布号 US5801410(A) 申请公布日期 1998.09.01
申请号 US19970859345 申请日期 1997.05.20
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, YUN-GI
分类号 H01L21/8247;H01L21/02;H01L21/822;H01L21/8242;H01L21/8246;H01L27/04;H01L27/10;H01L27/105;H01L27/108;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L29/78;H01L29/44;H01L29/52;H01L29/92 主分类号 H01L21/8247
代理机构 代理人
主权项
地址