发明名称 PRODUCTION OF SIF4
摘要 PROBLEM TO BE SOLVED: To provide a method for producing SiF4 , that prevents pyrolysis residue from being agglomerated into blocks, by using an alkali metal salt or alkaline-earth metal salt of hexafluorosilicic acid, and SiO2 and/or Al2 O3 . SOLUTION: This method uses an alkali metal salt (e.g. Na2 SiF6 ) or alkaline- earth metal salt (BaSiF6 ) of hexafluorosilicic acid, and SiO2 and/or Al2 O3 , to produce SiF4 . These salts may be commercial ones produced at low cost. It is preferable that SiO2 and Al2 O3 are, in general, 99wt.% pure or so. The SiO2 and Al2 O3 have an average particle size of 0.1 to 100μm as that of the primary particles. Quantity of SiO2 and/or Al2 O3 to be used is preferably 1 to 20wt.% based on that of the hexafluorosilicic acid. The preferable pyrolysis temperature is generally 500 to 800 deg.C, although varying to some extent depending on type of the silicate used.
申请公布号 JPH10231114(A) 申请公布日期 1998.09.02
申请号 JP19970033766 申请日期 1997.02.18
申请人 MITSUI CHEM INC 发明人 INOUE HIROYUKI;HARADA ISAO
分类号 C01B33/107;(IPC1-7):C01B33/107 主分类号 C01B33/107
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