发明名称 |
Electrostatic chuck having a unidirectionally conducting coupler layer |
摘要 |
An electrostatic chuck (20) for holding a substrate (45) in a process chamber (80) having a voltage supply terminal (65) for charging the chuck (20). The chuck includes an electrostatic member (25) comprising at least one electrode (30), an electrically insulated holding surface (40) for holding a substrate (45) thereon, and an electrical contact surface (48) for providing charge to the electrode. A unidirectionally conducting coupler layer (70) electrically couples the contact surface (48) of the electrostatic member to the voltage supply terminal to conduct charge substantially only in a single direction from the terminal to the contact surface. Preferably, an electrical connector (50) having a junction surface (55) bonded to the contact surface (55) of the electrode, and a terminal surface (60) for electrically contacting the voltage supply terminal (65), is used to electrically couple the unidirectionally conducting coupler layer (70) to the voltage supply terminal (65).
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申请公布号 |
US5801915(A) |
申请公布日期 |
1998.09.01 |
申请号 |
US19970829711 |
申请日期 |
1997.03.28 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KHOLODENKO, ARNOLD;VEYTSER, ALEXANDER M.;SHAMOUILIAN, SHAMOUIL |
分类号 |
B23Q3/15;C23C16/44;C23C16/455;C23C16/458;H01L21/683;H02N13/00;(IPC1-7):H02N13/00 |
主分类号 |
B23Q3/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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