Radiation-sensitive positive resist and composition containing the same,申请号HK19980101476-传众专利搜索

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发明名称	Radiation-sensitive positive resist and composition containing the same
摘要
申请公布号	HK1002523(A1)	申请公布日期	1998.08.28
申请号	HK19980101476	申请日期	1998.02.26
申请人	TORAY INDUSTRIES INC.	发明人	MUTSUO KATAOKA;AGUTO TOKUNAGA
分类号	G03F7/039;(IPC1-7):G03F	主分类号	G03F7/039
代理机构		代理人
主权项
地址

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