发明名称 RESIST COMPOSITION
摘要 A resist composition comprising (A) a high-molecular compound having at least one functional group which is decomposed by an acid to impart alkali solubility and containing no aromatic rings, (B) a compound which generates an acid upon irradiation with an actinic radiation, and (C) an amine having a molecular weight of 100 to 240 and a boiling point at 760 mmHg of 200 to 350 DEG C.
申请公布号 WO9837458(A1) 申请公布日期 1998.08.27
申请号 WO1998JP00705 申请日期 1998.02.20
申请人 NIPPON ZEON CO., LTD.;SONE, ATSUSHI;TANAKA, KIMIAKI 发明人 SONE, ATSUSHI;TANAKA, KIMIAKI
分类号 G03F7/004;G03F7/039;(IPC1-7):G03F7/039;C08L33/04 主分类号 G03F7/004
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