| 摘要 |
<p>A processing liquid (6) in a vessel (7) is heated by a heater (8) to evaporate, and the resulting vapor is controlled by a valve (9) and introduced into a treatment chamber (1) through a pipeline (10). In the treatment chamber (1), articles (5) being treated are placed on a heating plate (4) set on a conveying table (3). The articles being treated are heated by the heating plate so that a surface temperature of the articles being treated rises above, for example, a boiling point of the processing liquid. Surfaces of the articles being treated are exposed to vapor of the processing liquid introduced into the treatment chamber, so that surface refining such as improving of wettability and surface treatments such as ashing, etching and dry cleaning are performed depending upon a kind of the processing liquid used. Effects of the surface treatment can be enhanced by mixing an auxiliary gas into the vapor of the processing liquid and exposing the surfaces of the articles being treated to the mixed gas. The articles being treated, having been subjected to treatment are removed from the treatment chamber by driving the conveying table (3), subsequently introducing new articles being treated and repeating the surface treatment procedure.</p> |
