Test system for examining smooth surface of sample using laser beam

摘要

The test system includes a stray light device (1) for scanning the surface of a sample with a focused laser beam (4) and for detecting scattered light, which is reflected from the surface as the surface is scanned. the system also has a device to microscopically examine the markedly light scattering section of the surface, after its identification using the stray light device. An evacuatable sample chamber (2) is provided, in which the sample can be placed on a sample holder (16), and which has a transparent window (10), through which the laser beam passes, before it impinges on the surface of the sample. A deflection mirror (7) is cardan-mounted in the light path of the laser beam and is used to scan the surface of the sample.