发明名称 |
DIFFUSE SURFACE INTERFERENCE POSITION SENSOR |
摘要 |
Position of a diffusely scattering surface is detected by interfering backscattered light from respective input beams which illuminate a common spot. Through polarization of the input beams and appropriate filtering, backscattered light is isolated from specularly reflected light and interfered to form a fringe pattern on a detector. The position sensor has particular applicability as a push pin sensor in a hard disk servo system. |
申请公布号 |
WO9837379(A1) |
申请公布日期 |
1998.08.27 |
申请号 |
WO1998US03060 |
申请日期 |
1998.02.18 |
申请人 |
MICROE |
发明人 |
THORBURN, WILLIAM, G.;MITCHELL, DONALD, K.;HORWITZ, BRUCE, A. |
分类号 |
G01B9/02;G01B11/16;(IPC1-7):G01B9/02;G01D5/347 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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