INDUCTION PLASMA SOURCE INCLUDING CONVEX DOME-SHAPED INDUCTION COIL
摘要
An induction plasma source for integrated circuit fabrication includes an induction coil which defines a generally convex surface. The convex surface may be in the form of a spherical section less than a hemisphere, a paraboloid, or some other smooth convex surface. The windings of the induction coil may be spaced at different intervals in different sections of the coil and may be in multiple layers in at least a portion of the coil. Varying the shape of the coil and the distribution of the coil windings allows the plasma to be shaped in a desired manner.
申请公布号
WO9837739(A2)
申请公布日期
1998.08.27
申请号
WO1998US02261
申请日期
1998.02.20
申请人
NOVELLUS SYSTEMS, INC.
发明人
TOBIN, JEFFREY, A.;BENZING, JEFFREY, C.;BROADBENT, ELIOT, K.;ROUGH, J., KIRKWOOD, H.