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发明名称
METHOD AND APPARATUS FOR IONIC SPUTTERING
摘要
申请公布号
CA813321(A)
申请公布日期
1969.05.20
申请号
CAD813321
申请日期
申请人
LITTON SYSTEMS
发明人
GERALD S. ANDERSON;ROGER M. MOSESON
分类号
主分类号
代理机构
代理人
主权项
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