| 摘要 |
<p>A sealing structure or assembly 20 is used to form a seal around a chuck 30 that holds and supports a substrate 45 having a peripheral edge 50. An actuated, position-adjustable, sealing diaphragm 166 is disposed along the peripheral edge of the substrate. The diaphragm has a conformal seeling surface 170 capable of forming a seal when pressed against the peripheral edge of the substrate 46. A diaphragm actuator 175 actuates the seeling diaphragm from (i) a first non-sealing position 180 in which the conformal sealing surface of the diaphragm is spaced apart from the substrate held on the chuck to form a gap 190 therebetween, to (II) a second sealing position 186 in which the conformal sealing surface of the diaphragm presses against, and forms a seal with, the peripheral edge of the substrate. <IMAGE></p> |
