Vacuum coating apparatus with a crucible located in the vacuum chamber to receive the evaporation material,申请号EP19960117215-传众专利搜索

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发明名称	Vacuum coating apparatus with a crucible located in the vacuum chamber to receive the evaporation material
摘要
申请公布号	EP0775758(B1)	申请公布日期	1998.08.26
申请号	EP19960117215	申请日期	1996.10.26
申请人	BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG	发明人	SZCZYRBOWSKI, JOACHIM, DR.;TESCHNER, GOETZ;STEINIGER, GERHARD
分类号	C23C14/22;C23C14/02;C23C14/56;H01J37/34;(IPC1-7):C23C14/24;C23C14/35	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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