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发明名称
PRODUCTION OF THIN OXIDE FILM BY COATING METHOD
摘要
申请公布号
JPH10226519(A)
申请公布日期
1998.08.25
申请号
JP19970024954
申请日期
1997.02.07
申请人
NEC CORP
发明人
HASE TAKU
分类号
C01G23/00;C01G35/00;C23C26/00;H01G7/06;(IPC1-7):C01G23/00
主分类号
C01G23/00
代理机构
代理人
主权项
地址
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