发明名称 |
Semiconductor fuse device and method for forming a semiconductor fuse device |
摘要 |
A method for forming a semiconductor fuse device (23) having a fuse element (20) for an igniter device, comprises the steps of providing a semiconductor substrate (12), forming an insulator layer (14) on the semiconductor substrate, forming a single active layer (16) on the insulator layer, having a predetermined depth (18) of greater than 4 microns and patterning and etching the active layer to form the fuse element (20). Preferably, the forming a single active layer step includes the step of atomic bonding an active layer to the insulator layer.
|
申请公布号 |
US5798475(A) |
申请公布日期 |
1998.08.25 |
申请号 |
US19960681780 |
申请日期 |
1996.07.29 |
申请人 |
MOTOROLA, INC. |
发明人 |
REYNES, JEAN-MICHEL;ALLIER, JEAN-FRANCOIS;CAILLABA, JEAN |
分类号 |
H01H69/02;F42B3/13;H01H85/02;H01H85/04;H01H85/045;H01H85/046;(IPC1-7):F42B3/13 |
主分类号 |
H01H69/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|