PROCESS FOR THE FABRICATION OF DEVICES; UTILIZING ELECTROCHEMICALLY GENERATED GASES

摘要

Many devices, such as those based on III-V semiconductor materials, are produced utilizing gases such as arsine that require careful handling of compressed gas cylinders. This care has engendered a search for alternate approaches. It has be en found that the use of electrochemically generated gases such as arsine yields an efficient, pure source of such gases without necessitating the storage of large gas quantities. Thus, a device fabrication procedure including in situ electrochemic al generation of gases such as arsine is particularly useful.