发明名称 MANUFACTURING METHOD OF PHOTOVOLTAIC ELEMENT
摘要 PROBLEM TO BE SOLVED: To improve the photoconductive characteristics such as photoelectric conversion efficiency and leakage curent of photovoltaic element, by a method wherein a conductive substrate immersed in a water solution and an electrode immersed in a solution are made conductive so as to form a zinc oxide film on a conductive substrate to be etched away for the formation of a semiconductor layer. SOLUTION: Zinc nitrate water solution 203 in a specific concentration is prepared in a vessel 204 so as to satisfactorily agitate the water solution 203 using a magnetic agitator further to heat the solution up to a specific temperature using a heater 208. Next, a conductive substrate 201 whereon an opposite electrode 202 and an insulating tape 206 are bonded is connected to a power supply 205 and a load resistor 207, to form a circuit through the intermediary of water solution for the formation of a transparent zinc oxide thin film on the surface of a conductive substrate 201 on the negative electrode side, by impressing the circuit with a voltage in a rated current mode. Later, the thin film of the zinc oxide layer is etched away to form a semiconductor layer. Through these procedures, the photoconductive characteristics such as the photoelectric conversion efficiency, leakage current, etc., of the photovoltaic element can be improved.
申请公布号 JPH10229212(A) 申请公布日期 1998.08.25
申请号 JP19970345135 申请日期 1997.12.15
申请人 CANON INC 发明人 SANO MASAFUMI;KARIYA TOSHIMITSU
分类号 C25D9/08;H01L21/3063;H01L31/04 主分类号 C25D9/08
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