| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide the surface analyzation method and a device for the same, by which the high face directional resolution can be easily and simply obtained, even when a beam diameter of a probe beam is comparatively large, in the surface analyzation of a micro area. SOLUTION: When a surface of a sample 2 is irradiated by a probe beam from a beam source 1 while scanned, and a signal obtained from the surface of the sample 2 is detected by a detector 5 to analyze the surface of the sample 2, the distribution of the intensity of irradiation of the probe beam on the surface of the sample 2, and the distribution of the intensity of the detecting signal by the detector 5, are measured, and the face analyzation result of which the face directional resolution is improved, is obtained by executing the mathematical conversion (integrating conversion) to the both distributions.</p> |
