POSITION SENSING DETECTOR, MOTION DETECTING SYSTEM FOR LIGHT BEAM AND VIBRATION DETECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a detector system which enables monitoring of vibration using a plurality of transparent detectors. SOLUTION: A transparent detector herein applicable is a position sensing detector(PSD), a photodiode array or CCD imaging array. The detectors are mounted on a structural member 12 susceptible to vibration and the motion detected of a light beam with respect to the partially transparent light beam detectors 22 responds to the movement of the structural member 12 susceptible to the vibration. The system of the partially transparent light beam detectors allowing passing of the light beam enables application of a plurality of detectors using the same control light beam.