发明名称 PHOTOELECTRIC CONVERSION ELEMENT AND PHOTOELECTRIC CONVERSION DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a photoelectric conversion element which can precisely detect a reflected light-detecting point on a work, even when the point changes finely in an automatic focusing mechanism for exposure. SOLUTION: Light-receiving sections 61, 62, and 63, respectively composed of p-type diffusion layers, are formed on an n-type silicon substrate and MOS capacitors 64 and 65 are respectively formed between the sections 61 and 62 and between the sections 62 and 63. Gate electrodes 64G and 65G of the capacitors 64 and 65 are connected to a gate voltage control circuit 60B. The signal charges generated in the light-receiving sections 61 and 62 are outputted, based on a voltage from the control circuit 60B.</p>
申请公布号 JPH10229216(A) 申请公布日期 1998.08.25
申请号 JP19970031639 申请日期 1997.02.17
申请人 NIKON CORP 发明人 FUKUDA TAIICHIRO
分类号 G01B11/00;G03F7/20;G03F9/00;H01L21/027;H01L27/14;H01L27/146;H01L31/10;H01L31/16;(IPC1-7):H01L31/16 主分类号 G01B11/00
代理机构 代理人
主权项
地址