SURFACE INSPECTING APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a surface inspecting apparatus and method which improve a measuring accuracy in the inspection of a surface based on output signals of two photodetectors. SOLUTION: An optical element 25 is provided and the optical axis of scanning light 32 incident into a mounted substrate 7 is moved by the optical element 25 so that positions of light irradiating photodetecting surfaces 91 of two photodetectors 9 coincide or almost coincide. Thus, surface information signals of an object to be inspected separately sent by the two photodetectors 9 can coincide with each other or a difference therebetween can be minimized, thereby improving measuring accuracy in the inspection of the surface.