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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH10229094(A)
申请公布日期
1998.08.25
申请号
JP19970030616
申请日期
1997.02.14
申请人
SONY CORP
发明人
KANEMATSU SHIGERU
分类号
H01L29/73;H01L21/331;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
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